\definecolor{ugreen}{rgb}{0,0.5,0}

\begin{tikzpicture}[scale=0.6]
	\tikzstyle{unit} = [draw,inner sep=3pt,font=\tiny,minimum height=1.2em]
	\tikzstyle{bad_tag} = [fill=red!15,inner sep=1pt,align=center,font=\tiny,text=red]
	\tikzstyle{ok_tag} = [fill=ugreen!15,inner sep=1pt,align=center,font=\tiny,text=ugreen]
	
	\coordinate (o) at (0, 0);
	
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize] (n1_1) at ([yshift=5.5em]o.east){\textbf{Source}};
	\node[unit,anchor=west,fill=green!20](n1_2) at ([xshift=7.6em]n1_1.east){The};
	\node[unit,anchor=west,fill=green!20](n1_3) at ([xshift=0.8em]n1_2.east){Sharpen};
	\node[unit,anchor=west,fill=green!20](n1_4) at ([xshift=0.8em]n1_3.east){tool};
	\node[unit,anchor=west,fill=green!20](n1_5) at ([xshift=0.8em]n1_4.east){sharpens};
	\node[unit,anchor=west,fill=green!20](n1_6) at ([xshift=0.8em]n1_5.east){areas};
	\node[unit,anchor=west,fill=green!20](n1_7) at ([xshift=0.8em]n1_6.east){in};
	\node[unit,anchor=west,fill=green!20](n1_8) at ([xshift=0.8em]n1_7.east){an};
	\node[unit,anchor=west,fill=green!20](n1_9) at ([xshift=0.8em]n1_8.east){image};
	\node[unit,anchor=west,fill=green!20](n1_10) at ([xshift=0.8em]n1_9.east){.};
	
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize] (n2_1) at (o.east){\textbf{PE}};
	\node[unit,anchor=west,fill=red!20](n2_2) at ([xshift=1em]n2_1.east){Mit};
	\node[unit,anchor=west,fill=red!20](n2_3) at ([xshift=0.8em]n2_2.east){dem};
	\node[unit,anchor=west,fill=red!20](n2_4) at ([xshift=0.8em]n2_3.east){Scharfzeichner};
	\node[unit,anchor=west,fill=red!20](n2_5) at ([xshift=0.8em]n2_4.east){können};
	\node[unit,anchor=west,fill=red!20](n2_6) at ([xshift=0.8em]n2_5.east){Sie};
	\node[unit,anchor=west,fill=red!20](n2_7) at ([xshift=0.8em]n2_6.east){einzelne};
	\node[unit,anchor=west,fill=red!20](n2_8) at ([xshift=0.8em]n2_7.east){Bereiche};
	\node[unit,anchor=west,fill=red!20](n2_9) at ([xshift=0.8em]n2_8.east){in};
	\node[unit,anchor=west,fill=red!20](n2_10) at ([xshift=0.8em]n2_9.east){einem};
	\node[unit,anchor=west,fill=red!20](n2_11) at ([xshift=0.8em]n2_10.east){Bild};
	\node[unit,anchor=west,fill=red!20](n2_12) at ([xshift=0.8em]n2_11.east){scharfzeichnen};
	\node[unit,anchor=west,fill=red!20](n2_13) at ([xshift=0.8em]n2_12.east){.};
	
	
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize] (n3_1) at ([yshift=-5.5em]o.east){\textbf{MT}};
	\node[unit,anchor=west,fill=blue!20](n3_2) at ([xshift=4.7em]n3_1.east){Der};
	\node[unit,anchor=west,fill=blue!20](n3_3) at ([xshift=0.8em]n3_2.east){Schärfen-Werkezug};
	\node[unit,anchor=west,fill=blue!20](n3_4) at ([xshift=0.8em]n3_3.east){Bereiche};
	\node[unit,anchor=west,fill=blue!20](n3_5) at ([xshift=0.8em]n3_4.east){in};
	\node[unit,anchor=west,fill=blue!20](n3_6) at ([xshift=0.8em]n3_5.east){einem};
	\node[unit,anchor=west,fill=blue!20](n3_7) at ([xshift=0.8em]n3_6.east){Bild};
	\node[unit,anchor=west,fill=blue!20](n3_8) at ([xshift=0.8em]n3_7.east){Schärfer};
	\node[unit,anchor=west,fill=blue!20](n3_9) at ([xshift=0.8em]n3_8.east){erscheint};
	\node[unit,anchor=west,fill=blue!20](n3_10) at ([xshift=0.8em]n3_9.east){.};
	
	\node[bad_tag,anchor=south] at ([yshift=2pt]n1_2.north){BAD};
	\node[bad_tag,anchor=south] at ([yshift=2pt]n1_3.north){BAD};
	\node[bad_tag,anchor=south] at ([yshift=2pt]n1_4.north){BAD};
	\node[bad_tag,anchor=south] at ([yshift=2pt]n1_5.north){BAD};
	\node[ok_tag,anchor=south] at ([yshift=2pt]n1_6.north){OK};
	\node[ok_tag,anchor=south] at ([yshift=2pt]n1_7.north){OK};
	\node[ok_tag,anchor=south] at ([yshift=2pt]n1_8.north){OK};
	\node[ok_tag,anchor=south] at ([yshift=2pt]n1_9.north){OK};
	\node[ok_tag,anchor=south] (tag1) at ([yshift=2pt]n1_10.north){OK};
	
	\node[bad_tag,anchor=north] at ([yshift=-2pt]n3_2.south){BAD};
	\node[bad_tag,anchor=north] at ([yshift=-2pt]n3_3.south){BAD};
	\node[ok_tag,anchor=north] at ([yshift=-2pt]n3_4.south){OK};
	\node[ok_tag,anchor=north] at ([yshift=-2pt]n3_5.south){OK};
	\node[ok_tag,anchor=north] at ([yshift=-2pt]n3_6.south){OK};
	\node[ok_tag,anchor=north] at ([yshift=-2pt]n3_7.south){OK};
	\node[bad_tag,anchor=north] at ([yshift=-2pt]n3_8.south){BAD};
	\node[bad_tag,anchor=north] at ([yshift=-2pt]n3_9.south){BAD};
	\node[ok_tag,anchor=north] (tag2) at ([yshift=-2pt]n3_10.south){OK};
		
	\node[bad_tag,anchor=north] (gap_1)at ([xshift=-2em,yshift=-2em]n3_2.south){BAD};
	\node[ok_tag,anchor=north] (gap_2)at ([xshift=1.6em,yshift=-2em]n3_2.south){OK};
	\node[bad_tag,anchor=north] (gap_3)at ([xshift=4.4em,yshift=-2em]n3_3.south){BAD};
	\node[ok_tag,anchor=north] (gap_4)at ([xshift=2.5em,yshift=-2em]n3_4.south){OK};
	\node[ok_tag,anchor=north] (gap_5)at ([xshift=1.3em,yshift=-2em]n3_5.south){OK};
	\node[ok_tag,anchor=north] (gap_6)at ([xshift=2em,yshift=-2em]n3_6.south){OK};
	\node[ok_tag,anchor=north] (gap_7)at ([xshift=1.7em,yshift=-2em]n3_7.south){OK};
	\node[ok_tag,anchor=north] (gap_8)at ([xshift=2.4em,yshift=-2em]n3_8.south){OK};
	\node[ok_tag,anchor=north] (gap_9)at ([xshift=2.5em,yshift=-2em]n3_9.south){OK};
	\node[ok_tag,anchor=north](tag3) at ([xshift=1.3em,yshift=-2em]n3_10.south){OK};

	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_1.north) -- ([yshift=2em]gap_1.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_2.north) -- ([yshift=2em]gap_2.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_3.north) -- ([yshift=2em]gap_3.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_4.north) -- ([yshift=2em]gap_4.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_5.north) -- ([yshift=2em]gap_5.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_6.north) -- ([yshift=2em]gap_6.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_7.north) -- ([yshift=2em]gap_7.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_8.north) -- ([yshift=2em]gap_8.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](gap_9.north) -- ([yshift=2em]gap_9.north);
	\draw[dash pattern=on 2pt off 1pt,gray,line width=1pt](tag3.north) -- ([yshift=2em]tag3.north);
	
	\draw [line width=1pt](n1_2.south) -- (n2_3.north);
	\draw [line width=1pt](n1_3.south) -- (n2_4.north);
	\draw [line width=1pt](n1_4.south) -- (n2_4.north);
	\draw [line width=1pt](n1_5.south) -- (n2_12.north);
	\draw [line width=1pt](n1_6.south) -- (n2_8.north);
	\draw [line width=1pt](n1_7.south) -- (n2_9.north);
	\draw [line width=1pt](n1_8.south) -- (n2_10.north);
	\draw [line width=1pt](n1_9.south) -- (n2_11.north);
	\draw [line width=1pt](n1_10.south) -- (n2_13.north);
	
	\draw[line width=1pt,red!60] (n2_3.south) -- (n3_2.north);
	\draw[line width=1pt,red!60] (n2_4.south) -- (n3_3.north);
	\draw[line width=1pt,ugreen!60] (n2_8.south) -- (n3_4.north);
	\draw[line width=1pt,ugreen!60] (n2_9.south) -- (n3_5.north);
	\draw[line width=1pt,ugreen!60] (n2_10.south) -- (n3_6.north);
	\draw[line width=1pt,ugreen!60] (n2_11.south) -- (n3_7.north);
	\draw[line width=1pt,red!60] (n2_12.south) -- (n3_8.north);
	\draw[line width=1pt,ugreen!60] (n2_13.south) -- (n3_10.north);
	
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize]  at ([xshift=4.6em]tag1.east){\textbf{Source tags}};
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize]  at ([xshift=2.6em]tag2.east){\textbf{MT tags}};
	\node[anchor=west,inner sep=0pt,align=center,font=\scriptsize]  at ([xshift=1.1em]tag3.east){\textbf{Gap tags}};
\end{tikzpicture}